关键词: 纳米结构, 表面形貌, 钛膜

Abstract:

Objective To construct four different micro- and nano-phase titanium film models and investigate the characteristics of their surface micro-topography. Methods Four different titanium films were prepared on commercial titanium discs, by direct current magnetron sputtering, at ambient, 100, 250, 380 ℃ substrate temperature, respectively. Their surface topography and crystal sizes were investigated using atomic force microscope（AFM） and X-ray diffraction（XRD）. The size of granule and surface roughness in different group was calculated and compared. Results All samples were covered by a thin film consisting of dense round or ovaloid granules. The granules and crystals was growing as the substrate temperature increasing. The Ti substrate had greater effect on the surface topography of film compared with Si substrate. This kind of complex topography caused the surface roughness of Ti substrate group decreased as the granules growing. Conclusion In our study, four different micro- and nano-phase titanium film models were constructed for our coming investigation of their topographical influence on biological reaction of proteins and cells. Basic data on surface features was obtained for next in vitro and in vivo experiment.

Key words: nanostructure, surface topography, titanium film